博士論文

Clarification of nano-meter-scale surface-layer reaction mechanisms in plasma etching processes

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Clarification of nano-meter-scale surface-layer reaction mechanisms in plasma etching processes

Call No. (NDL)
UT51-2013-C834
Bibliographic ID of National Diet Library
024709951
Material type
博士論文
Author
Tomoko Ito [著]
Publisher
[Tomoko Ito]
Publication date
[2013]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
大阪大学,博士(工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Tomoko Ito [著]
Author Heading
伊藤, 智子 イトウ, トモコ
Publication, Distribution, etc.
Publication Date
[2013]
Publication Date (W3CDTF)
2013
Extent
1冊
Alternative Title
プラズマエッチングにおけるナノメートル表面層反応機構の解明 プラズマ エッチング ニ オケル ナノメートル ヒョウメンソウ ハンノウ キコウ ノ カイメイ
Degree grantor/type
大阪大学