The Twelfth International Symposium on Sputtering & Plasma Processes ISSP 2013 : proceedings

• Material Type: 電子資料
• ISSN: 2187-7637
• Title: The Twelfth International Symposium on Sputtering & Plasma Processes ISSP 2013 : proceedings
• Title Transcription: The Twelfth International Symposium on Sputtering & Plasma Processes ISSP 2013 : proceedings
• Author/Editor: editor: Yasuhito Gotoh
• Author Heading: 後藤, 康仁, 1962- ゴトウ, ヤスヒト, 1962- ( 00930707 )Authorities
• Publication, Distribution, etc.: [Hakusan] : ISSP 2011 Committee
• Publication Date: 2013.7
• Publication Date (W3CDTF): 2013
• Extent: CD-ROM 1枚
• Size: 12cm
• Place of Publication (Country Code): JP
• Text Language Code: eng
• Note (Material Type): [電子資料]
• Computer File Characteristics: テキスト・データ
• Note (Computer File Characteristics): PDF形式
• NDLC: YH245
• Target Audience: 一般
• Note (General): 会期・会場: July 10-12, 2013 Kyoto Research Park Kyoto, Japan
• Holding library: 国立国会図書館
• Call No.: YH245-B1158
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 024719085; http://id.ndl.go.jp/bib/024719085
• National Bibliography No. (JPNO): 22288891
• Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
• Bibliographic Record Category (NDL): 143

Table of Contents

CONTENTS

Wednesday July 10:Oral session at Science Hall

[Opening Session]

KN-1 Plasma assisted PVD: The past and the present,/ 1

OP-1 Reactive magnetron sputtering: from fundamentals to high deposition rate processes,/ 5