Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 7 : 28 August 2013 : San Diego, California, United States : 2013 SPIE conference 8819, instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 7 : Aug 2013, San Diego, CA. (SPIE Proceedings ; 8819)

Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 7 : 28 August 2013 : San Diego, California, United States : 2013 SPIE conference 8819, instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 7 : Aug 2013, San Diego, CA.

(SPIE Proceedings ; 8819)

Call No. (NDL): M17-14-1265
Bibliographic ID of National Diet Library: 025019754

Material type: 図書

Author: Postek, Michael T.ほか

Publisher: SPIE

Publication date: c2013.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9780819496690
ISSN (series): 0277786X
Title: Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 7 : 28 August 2013 : San Diego, California, United States : 2013 SPIE conference 8819, instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 7 : Aug 2013, San Diego, CA.
Series Title: SPIE Proceedings ; 8819
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8819. 0277-786X
Author Heading: Postek, Michael T.
Orji, Ndubuisi George.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2013.
Publication Date (W3CDTF): 2013
Extent: 1 v. (various pagings)
Other physical details: ill.
Size: 28 cm.
Additional Title: SPIE optics + photonics.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Nanostructured materials--Congresses.
Microfabrication--Congresses.
Nanotechnology--Congresses.
LCC: TA418.9.N35
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Source: SPIE Digital Library
http://link.spie.org/PSISDG/8819/1
Holding library: 国立国会図書館
Call No.: M17-14-1265
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025019754
http://id.ndl.go.jp/bib/025019754
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215