図書

Photomask technology 2013 : 10-12 September 2013 : Monterey, California, United States : SPIE conference on photomask technology 2013 : 33rd international symposium on photomask technology : Sep 2013, Monterey, CA. (SPIE Proceedings ; 8880)

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Photomask technology 2013 : 10-12 September 2013 : Monterey, California, United States : SPIE conference on photomask technology 2013 : 33rd international symposium on photomask technology : Sep 2013, Monterey, CA.

(SPIE Proceedings ; 8880)

Call No. (NDL)
M17-14-1683
Bibliographic ID of National Diet Library
025153412
Material type
図書
Author
Faure, Thomas B.ほか
Publisher
SPIE
Publication date
c2013.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) ; 28 cm.
NDC
-
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Papers.

Other physical details：

ill.

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Paper

Material Type
図書
ISBN
9780819495457 (paperback)
ISSN (series)
0277786X
Title
Photomask technology 2013 : 10-12 September 2013 : Monterey, California, United States : SPIE conference on photomask technology 2013 : 33rd international symposium on photomask technology : Sep 2013, Monterey, CA.
Series Title
SPIE Proceedings ; 8880
Author Heading
Faure, Thomas B.
Ackmann, Paul W.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2013.
Publication Date (W3CDTF)
2013
Extent
1 v. (various pagings)