Plasma electronics : applications in microelectronic device fabrication

• Material Type: 図書
• ISBN: 9781482222050 (hardcover : alk. paper); 1482222051 (hardcover : alk. paper)
• Title: Plasma electronics : applications in microelectronic device fabrication
• Author/Editor: Toshiaki Makabe, Zoran Lj. Petrovic.
• Edition: Second edition.
• Author Heading: 真壁, 利明, 1947- マカベ, トシアキ, 1947- ( 00162951 )Authorities; Petrović, Z.
• Publication, Distribution, etc.: Boca Raton, FL : CRC Press (出版)
• Publication Date: [2015]
• Publication Date (W3CDTF): 2015
• Extent: xxxv, 376 pages
• Other physical details: illustrations
• Size: 24 cm
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Plasma engineering.
• LCC: TA2020
• DDC: 621.044
• NDLC: MC241
• Target Audience: 一般
• Note (General): "Version Date: 20140710"--Verso of title page.
• Note (Bibliography): Includes bibliographical references and index.
• Collection (particular): 日本関係外国語図書
• Holding library: 国立国会図書館
• Call No.: MC241-B33
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 025249903; http://id.ndl.go.jp/bib/025249903
• LC Control Number: 2014016456; https://lccn.loc.gov/2014016456
• OCLC No.: 868641989; https://www.worldcat.org/oclc/868641989
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: IntroductionPhenomenological description of the charged particle transportMacroscopic plasma characteristics...