Plasma processing 19 : symposium "plasma processing 19" : PRiME 2012 joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan : Oct 2012, Honolulu, HI. (ECS Transactions ; 50 (no. 46))

Plasma processing 19 : symposium "plasma processing 19" : PRiME 2012 joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan : Oct 2012, Honolulu, HI.

(ECS Transactions ; 50 (no. 46))

Call No. (NDL): M17-14-3090
Bibliographic ID of National Diet Library: 025753860

Material type: 図書

Author: Symposium on Plasma Processing (19th : 2012 : Honolulu, Hawaii)ほか

Publisher: The Electrochemical Society

Publication date: [2013]

Material Format: Paper

Capacity, size, etc.: vi, 93 pages ; 23 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Other physical details：: illustrations

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Paper

Material Type: 図書
ISBN: 1623320828 (Softcover)
9781623320829 (Softcover)
1607684349 (PDF)
9781607684343 (PDF)
ISSN (series): 1938-5862
Title: Plasma processing 19 : symposium "plasma processing 19" : PRiME 2012 joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan : Oct 2012, Honolulu, HI.
Series Title: ECS Transactions ; 50 (no. 46)
Title Heading: ECS transactions ; v. 50, no. 46.
Author Heading: Symposium on Plasma Processing (19th : 2012 : Honolulu, Hawaii)
Mathad, S.
Publication, Distribution, etc.: Pennington, NJ, USA : The Electrochemical Society (出版)
Publication Date: [2013]
Publication Date (W3CDTF): 2013
Extent: vi, 93 pages
Other physical details: illustrations
Size: 23 cm.
Alternative Title: Dielectric and semiconductor materials, devices, and processing
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
Subject Heading: Plasma engineering--Congresses.
Plasma etching--Congresses.
Semiconductors--Congresses.
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-14-3090
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025753860
http://id.ndl.go.jp/bib/025753860
OCLC No.: 887868327
https://www.worldcat.org/oclc/887868327
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215