Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XX : 9-12 February 2015 : San Francisco, California, United States : meeting on laser applications in microelectronic and optoelectronic manufacturing : LAMOM-20 : laser applications in microelectronic and optoelectronic manufacturing (LAMOM) 20 conference : Feb 2015, San Francisco, CA. (SPIE Proceedings ; 9350)

Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XX : 9-12 February 2015 : San Francisco, California, United States : meeting on laser applications in microelectronic and optoelectronic manufacturing : LAMOM-20 : laser applications in microelectronic and optoelectronic manufacturing (LAMOM) 20 conference : Feb 2015, San Francisco, CA.

(SPIE Proceedings ; 9350)

Call No. (NDL): M17-15-2442
Bibliographic ID of National Diet Library: 026368238

Material type: 図書

Author: Roth, Stephan.ほか

Publisher: SPIE

Publication date: [2015]

Material Format: Paper

Capacity, size, etc.: 1 volume (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Other physical details：: illustrations

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Paper

Material Type: 図書
ISBN: 9781628414400
1628414405
ISSN (series): 0277-786X
Title: Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XX : 9-12 February 2015 : San Francisco, California, United States : meeting on laser applications in microelectronic and optoelectronic manufacturing : LAMOM-20 : laser applications in microelectronic and optoelectronic manufacturing (LAMOM) 20 conference : Feb 2015, San Francisco, CA.
Series Title: SPIE Proceedings ; 9350
Title Heading: Proceedings of SPIE--the International Society for Optical Engineering ; 9350.
Author Heading: Roth, Stephan.
Nakata, Yoshiki.
Neuenschwander, Beat.
Xu, Xianfan.
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2015]
Publication Date (W3CDTF): 2015
Extent: 1 volume (various pagings)
Other physical details: illustrations
Size: 28 cm.
Alternative Title: Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) 20 : 9-12 February 2015 : San Francisco, California, United States
SPIE. photonics west
Place of Publication (Country Code): US
Text Language Code: eng
Genre/Form Terms: Conference proceedings.
Content Type: text
Media Type: unmediated
Carrier Type: volume
Subject Heading: Microelectronics--Congresses.
Photonics--Congresses.
Photons--Congresses.
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-15-2442
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026368238
http://id.ndl.go.jp/bib/026368238
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215