Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XX : 9-12 February 2015 : San Francisco, California, United States.

• Material Type: 図書
• ISBN: 9781628414400; 1628414405
• ISSN (series): 0277-786X
• Title: Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XX : 9-12 February 2015 : San Francisco, California, United States.
• Series Title: SPIE Proceedings ; 9350
• Title Heading: Proceedings of SPIE--the International Society for Optical Engineering ; 9350.
• Author Heading: Roth, Stephan.; Nakata, Yoshiki.; Neuenschwander, Beat.; Xu, Xianfan.
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2015]
• Publication Date (W3CDTF): 2015
• Extent: 1 volume (various pagings)
• Other physical details: illustrations
• Size: 28 cm.
• Alternative Title: Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) 20 : 9-12 February 2015 : San Francisco, California, United States; SPIE. photonics west
• Additional Title: meeting on laser applications in microelectronic and optoelectronic manufacturing : LAMOM-20 : laser applications in microelectronic and optoelectronic manufacturing (LAMOM) 20 conference : Feb 2015, San Francisco, CA.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Conference proceedings.
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Microelectronics--Congresses.; Photonics--Congresses.; Photons--Congresses.
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-15-2442
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 026368238; http://id.ndl.go.jp/bib/026368238
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215