Handbook of silicon based MEMS materials and technologies Second edition. (Micro & nano technologies series)

Handbook of silicon based MEMS materials and technologies

Second edition.

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Material Type: 図書
ISBN: 0323299652
9780323299657
Title: Handbook of silicon based MEMS materials and technologies
Author/Editor: edited by Markku Tilli [and five others].
Edition: Second edition.
Series Title: Micro & nano technologies series
Title Heading: Micro & nano technologies.
Author Heading: Tilli, Markku.
Publication, Distribution, etc.: London, UK : William Andrew (出版)
Publication Date: 2015.
Publication Date (W3CDTF): 2015
Extent: xxxvii, 787 pages
Other physical details: illustrations
Size: 29 cm.
Place of Publication (Country Code): GB
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
Subject Heading: Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
LCC: TK7875.H36 2015
NDLC: ND416
Target Audience: 一般
Note (Bibliography): Includes bibliographical references and index.
Holding library: 国立国会図書館
Call No.: ND416-B81
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026427416
http://id.ndl.go.jp/bib/026427416
OCLC No.: 921939919
https://www.worldcat.org/oclc/921939919
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 211