China semiconductor technology international conference 2013 (CSTIC 2013) : symposia of CSTIC 2013 : Mar 2013, Shanghai, China. (ECS Transactions ; 52 (no. 1))

China semiconductor technology international conference 2013 (CSTIC 2013) : symposia of CSTIC 2013 : Mar 2013, Shanghai, China.

(ECS Transactions ; 52 (no. 1))

Call No. (NDL): M17-15-2666
Bibliographic ID of National Diet Library: 026517875

Material type: 図書

Author: Semiconductor Equipment and Materials International (SEMI)

Publisher: The Electrochemical Society

Publication date: [2013]

Material Format: Paper

Capacity, size, etc.: xxii, 1115 pages ; 23 cm.

NDC: -

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Notes on use

Note (General)：: Selected papers."CSTIC is the largest and the most comprehensive annual industrial semiconductor technology conference in China."--Preface."These pape...

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Paper

Material Type: 図書
ISBN: 9781623320300 (Softcover)
ISSN (series): 1938-5862
Title: China semiconductor technology international conference 2013 (CSTIC 2013) : symposia of CSTIC 2013 : Mar 2013, Shanghai, China.
Series Title: ECS Transactions ; 52 (no. 1)
Author Heading: Semiconductor Equipment and Materials International (SEMI)
Publication, Distribution, etc.: Pennington, NJ, USA : The Electrochemical Society (出版)
Publication Date: [2013]
Publication Date (W3CDTF): 2013
Extent: xxii, 1115 pages
Size: 23 cm.
Alternative Title: Dielectric and semiconductor materials, devices, and processing
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Selected papers.
"CSTIC is the largest and the most comprehensive annual industrial semiconductor technology conference in China."--Preface.
"These papers are divided into eleven (11) sections according to the eleven symposia of CSTIC 2013."--Preface.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-15-2666
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026517875
http://id.ndl.go.jp/bib/026517875
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215