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Bibliographic Record
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- Material Type
- 電子資料
- ISSN
- 2187-7637
- Title Transcription
- The 13th International Symposium on Sputtering & Plasma Processes ISSP 2015
- Author/Editor
- editor Takeo Nakano
- Author Heading
- 中野, 武雄, 応用物理学 ナカノ, タケオ, オウヨウ ブツリガク ( 001208860 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2015.7
- Publication Date (W3CDTF)
- 2015
- Extent
- CD-ROM 1枚