ICPT 2014 : proceedings of international conference on planarization/CMP technology 2014 : November 19-21, 2014 : Kobe International Conference Center : Kobe, Japan : 11th ICPT2014 : Nov 2014, Kobe, Japan.

• Material Type: 図書
• ISBN: 9781479955565; 1479955566
• Title: ICPT 2014 : proceedings of international conference on planarization/CMP technology 2014 : November 19-21, 2014 : Kobe International Conference Center : Kobe, Japan : 11th ICPT2014 : Nov 2014, Kobe, Japan.
• Author Heading: International Conference on Planarization/CMP Technology (11th : 2014 : Kōbe-shi, Japan); Japan Society of Precision Engineering. Japan Planarization and CMP Technical Committee.
• Publication, Distribution, etc.: [Piscataway, N.J.] : IEEE (出版)
• Publication Date: [2014]; 著作権日付 : ©2014
• Publication Date (W3CDTF): 2014
• Extent: 355 pages
• Other physical details: illustrations
• Size: 27 cm
• Alternative Title: 2014 ICPT : international conference on planarization/CMP technology : proceedings : date Nov. 19-21, 2014 : venue Kobe International Conference Center, Kobe, Japan
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Conference papers and proceedings.
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Chemical mechanical planarization--Congresses.; Chemical mechanical planarization.
• NDLC: M17
• Target Audience: 一般
• Note (General): Abstracts and papers.; IEEE catalog number CFP1463Z-PRT.
• Note (Bibliography): Includes bibliographical references.
• Holding library: 国立国会図書館
• Call No.: M17-15-3218
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 026717055; http://id.ndl.go.jp/bib/026717055
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215