Silicon wet bulk micromachining for MEMS

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Material Type: 図書
ISBN: 981461372X
9789814613729
Title: Silicon wet bulk micromachining for MEMS
Author/Editor: Prem Pal, Kasuo Sato.
Author Heading: Pal, Prem.
佐藤, 一雄, 1948- サトウ, カズオ, 1948- ( 00865926 )Authorities
Publication, Distribution, etc.: Singapore : Pan Stanford Publishing (出版)
Publication Date (W3CDTF): 2017
Extent: xii, 412 pages
Other physical details: illustrations (some color)
Size: 24 cm
Place of Publication (Country Code): SG
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
Subject Heading: Microelectromechanical systems.
Micromachining.
LCC: TK7875
NDLC: ND371
Target Audience: 一般
Note (Bibliography): Includes bibliographical references and index.
Collection (particular): 日本関係外国語図書
Holding library: 国立国会図書館
Call No.: ND371-B108
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 028013870
http://id.ndl.go.jp/bib/028013870
OCLC No.: 953886622
https://www.worldcat.org/oclc/953886622
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 211