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Table of Contents
目次
序論 半導体微細パターニング技術とリソグラフィ
1 はじめに/ 3
2 微細化の指針とその効果/ 3
3 光リソグラフィ技術の発展とその限界/ 5
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Kanto
東京都立中央図書館
Paper- Call No.：
- 549.7-5113-2017
- Book Registration Number：
- 7109219583
Kinki
滋賀県立図書館
Paper- Call No.：
- 3-5497-ｵ
- Book Registration Number：
- 143522316
other
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- ISBN
- 978-4-86043-467-0
- Title Transcription
- ハンドウタイ ビサイ パターニング : ゲンカイ オ コエル ポスト ヒカリ リソグラフィ ギジュツ
- Author/Editor
- 岡崎信次 監修
- Author Heading
- 岡崎, 信次 オカザキ, シンジ ( 00943837 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2017.4
- Publication Date (W3CDTF)
- 2017
- Extent
- 382,12p