Handbook of silicon wafer cleaning technology

• Material Type: 図書
• ISBN: 9780323510844 (paperback); 0323510841 (paperback); 9780323510851 (electronic bk.); 032351085X (electronic bk.)
• Title: Handbook of silicon wafer cleaning technology
• Author/Editor: edited by Karen A. Reinhardt, Werner Kern.
• Edition: Third edition.
• Author Heading: Reinhardt, Karen A.; Kern, Werner, 1925-
• Publication, Distribution, etc.: Oxford, United Kingdom : William Andrew (出版)
• Publication Date: [2018]; 著作権日付 : ©2018
• Publication Date (W3CDTF): 2018
• Extent: xviii, 773 pages
• Size: 23 cm
• Place of Publication (Country Code): GB
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Silicon-on-insulator technology.; TECHNOLOGY & ENGINEERING / Mechanical.
• LCC: TK7871.85
• DDC: 621.3815/2
• NDLC: ND371
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-B120
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 028206833; http://id.ndl.go.jp/bib/028206833
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: Front Cover; Handbook of Silicon Wafer Cleaning Technology; Handbook of Silicon Wafer Cleaning Technology; Copyright; Contents; List of Contributors; ...
• Summary, etc.: Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semico...