2016 14th international Baltic conference on atomic layer deposition (BALD 2016) : St. Petersburg, Russia : 2-4 October 2016 : Baltic ALD 2016 : Oct 2016, St. Petersburg, Russia.

• Material Type: 図書
• ISBN: 9781509034178 (Print-On-Demand)
• Title: 2016 14th international Baltic conference on atomic layer deposition (BALD 2016) : St. Petersburg, Russia : 2-4 October 2016 : Baltic ALD 2016 : Oct 2016, St. Petersburg, Russia.
• Author Heading: International Baltic Conference on Atomic Layer Deposition (14th : 2016 : Saint Petersburg, Russia); Drozd, V. E.; Egorov, N. V. (Nikolay V.); Nikiforov, K. A.
• Publication, Distribution, etc.: Piscataway, NJ : IEEE (出版)
• Publication Date: [2016]; 著作権日付 : ©2016
• Publication Date (W3CDTF): 2016
• Extent: 71 pages
• Other physical details: illustrations
• Size: 28 cm
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Conference papers and proceedings.
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Atomic layer deposition--Congresses.; Atomic layer deposition.
• LCC: TS695
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.; IEEE catalog number CFP16H65-POD.
• Note (Content): Annotation
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-18-1838
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 028500919; http://id.ndl.go.jp/bib/028500919
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215