Micro electro mechanical systems

• Material Type: 図書
• ISBN: 9789811059445 (print)
• ISBN (error code): 9789811059452 (electronic bk.); 9789811059469 (print and electronic bundle)
• Title: Micro electro mechanical systems
• Author/Editor: Qing-An Huang, editor.
• Series Title: Springer reference; Micro/nano technologies
• Author/Editor (Series Title): Springer
• Author Heading: Huang, Qing-An, 1963-
• Publication, Distribution, etc.: Singapore : Springer (出版)
• Publication Date: [2018]
• Publication Date (W3CDTF): 2018
• Extent: 2 volumes
• Size: 25 cm.
• Place of Publication (Country Code): SG
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Digital File Characteristics: ファイル種別 : text file; デジタル・コンテンツ・フォーマット : PDF
• Subject Heading: Microelectromechanical systems.; Engineering.; Mechatronics.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Microwaves, RF and Optical Engineering.
• LCC: TK7875
• DDC: 621.381
• NDLC: NB21
• Target Audience: 一般
• Note (General): Includes index.
• Holding library: 国立国会図書館
• Call No.: NB21-B23
• Related Material (DOI): 10.1007/978-981-10-5945-2
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 028801834; http://id.ndl.go.jp/bib/028801834
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Summary, etc.: This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical asp...