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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- テイユウデンリツ コウタソウ コウゾウ オ モチイタ マイクロ デバイス ノ ケンキュウ
- Author/Editor
- 鈴木洋一朗 [著]
- Author Heading
- 鈴木, 洋一朗 スズキ, ヨウイチロウ
- Publication, Distribution, etc.
- Publication Date
- [2017]
- Publication Date (W3CDTF)
- 2017
- Extent
- 1冊
- Alternative Title
- Study of micro device applying low permittivity multilayer structure