Nanometer-resolved fluidity of diacrylate monomers between silica surfaces for sub-15 nm ultraviolet nanoimprinting

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Material Type: 博士論文
Title: Nanometer-resolved fluidity of diacrylate monomers between silica surfaces for sub-15 nm ultraviolet nanoimprinting
Author/Editor: Shunya Ito [著]
Author Heading: 伊藤, 駿也イトウ, シュンヤ
Publication, Distribution, etc.: [Shunya Ito]
Publication Date: [2017]
Publication Date (W3CDTF): 2017
Extent: 1冊
Alternative Title: サブ15nm光ナノインプリント成形に向けた重合性モノマーのシリカナノ空間での流動性サブ 15nm ヒカリナノインプリントセイケイニムケタジュウゴウセイモノマーノシリカナノクウカンデノリュウドウセイ
Degree grantor/type: 東北大学
Date Granted: 平成29年3月24日
Date Granted (W3CDTF): 2017
Dissertation Number: 甲第17574号
Degree Type: 博士(工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Target Audience: 一般
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2018-A380
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 029042224
http://id.ndl.go.jp/bib/029042224
Bibliographic Record Category (NDL): 213