図書

Optical metrology and inspection for industrial applications V : 11-13 October 2018 : Beijing, China : conference on optical metrology and inspection for industrial applications 5 : SPIE/COS photonics Asia : Oct 2018, Beijing, China. (SPIE Proceedings ; 10819)

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Optical metrology and inspection for industrial applications V : 11-13 October 2018 : Beijing, China : conference on optical metrology and inspection for industrial applications 5 : SPIE/COS photonics Asia : Oct 2018, Beijing, China.

(SPIE Proceedings ; 10819)

Call No. (NDL)
M17-20-310
Bibliographic ID of National Diet Library
029482720
Material type
図書
Author
Optical Metrology and Inspection for Industrial Applications (Conference) (5th : 2018 : Beijing, China)ほか
Publisher
SPIE
Publication date
[2018]
Material Format
Paper
Capacity, size, etc.
1 volume (various pagings) ; 28 cm.
NDC
-
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Papers.

Other physical details：

illustrations (black and white)

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Paper

Material Type
図書
ISBN
9781510622364 (paperback)
ISSN (series)
0277-786X
Title
Optical metrology and inspection for industrial applications V : 11-13 October 2018 : Beijing, China : conference on optical metrology and inspection for industrial applications 5 : SPIE/COS photonics Asia : Oct 2018, Beijing, China.
Series Title
SPIE Proceedings ; 10819
Title Heading
Proceedings of SPIE--the International Society for Optical Engineering ; v. 10819. 1996-756X
Author Heading
Optical Metrology and Inspection for Industrial Applications (Conference) (5th : 2018 : Beijing, China)
Han, Sen.
Yoshizawa, Tōru, 1939-
Zhang, Song (Optical engineer)
Tsinghua University.
Publication, Distribution, etc.
Bellingham, Washington, USA : SPIE (出版)
Publication Date
[2018]
Publication Date (W3CDTF)
2018