Mechanical properties of silicon based compounds : silicides

• Material Type: 図書
• ISBN: 3030225976 hardcover; 9783030225971 hardcover
• ISSN (series): 1612-1317
• Title: Mechanical properties of silicon based compounds : silicides
• Author/Editor: Joshua Pelleg.
• Series Title: Engineering materials
• Title Heading: Engineering materials.
• Author Heading: Pelleg, Joshua.
• Publication, Distribution, etc.: Cham, Switzerland : Springer (出版)
• Publication Date: [2019]
• Publication Date (W3CDTF): 2019
• Extent: xvi, 274 pages
• Size: 24 cm.
• Place of Publication (Country Code): CH
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Silicides--Mechanical properties.; Silicides.
• LCC: TK7871.15.S54
• DDC: 621.38173
• NDLC: ND371
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references.
• Holding library: 国立国会図書館
• Call No.: ND371-D5
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 030110187; http://id.ndl.go.jp/bib/030110187
• OCLC No.: 1101280657; https://www.worldcat.org/oclc/1101280657
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Summary, etc.: This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process ...