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図書

3D and circuit integration of MEMS

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3D and circuit integration of MEMS

Call No. (NDL)
NB21-D5
Bibliographic ID of National Diet Library
030747840
Material type
図書
Author
edited by Masayoshi Esashi
Publisher
Wiley-VCH
Publication date
[2021]
Material Format
Paper
Capacity, size, etc.
xii, 506 pages ; 25 cm
NDC
-
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Detailed bibliographic record

Contents:

Front MatterOverview / Masayoshi EsashiBulk Micromachining / Xinxin Li, Heng Yang...

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Bibliographic Record

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Paper

Material Type
図書
ISBN
9783527346479 (hbk.)
9783527823239 (electronic bk. oBook)
3527823239 (electronic bk. oBook)
9783527823253 (ebook)
3527823255 (ebook)
9783527823246 (ePub ebook)
3527823247 (ePub ebook)
Author/Editor
edited by Masayoshi Esashi
Author Heading
江刺, 正喜, 1949- エサシ, マサヨシ, 1949- ( 00154561 )Authorities
Publication, Distribution, etc.
Publication Date
[2021]
Publication Date (W3CDTF)
2021
Extent
xii, 506 pages
Size
25 cm
Place of Publication (Country Code)
DE
Text Language Code
eng
Content Type
text
Media Type
unmediated
Carrier Type
volume
NDLC
Target Audience
一般
Collection (particular)
日本関係外国語図書
Holding library
国立国会図書館
Call No.
NB21-D5
Related Material (DOI)
10.1002/9783527823239
Data Provider (Database)
国立国会図書館 : 国立国会図書館蔵書
Bibliographic ID (NDL)
030747840
Cataloging Rule
RDA
Bibliographic Record Category (NDL)
211