図書

3D and circuit integration of MEMS

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3D and circuit integration of MEMS

Call No. (NDL)
NB21-D5
Bibliographic ID of National Diet Library
030747840
Material type
図書
Author
edited by Masayoshi Esashi
Publisher
Wiley-VCH
Publication date
[2021]
Material Format
Paper
Capacity, size, etc.
xii, 506 pages ; 25 cm
NDC
-
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Detailed bibliographic record

Contents:

Front MatterOverview / Masayoshi EsashiBulk Micromachining / Xinxin Li, Heng Yang...

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Bibliographic Record

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Paper

Material Type
図書
ISBN
9783527346479 (hbk.)
9783527823239 (electronic bk. oBook)
3527823239 (electronic bk. oBook)
9783527823253 (ebook)
3527823255 (ebook)
9783527823246 (ePub ebook)
3527823247 (ePub ebook)
Author/Editor
edited by Masayoshi Esashi
Author Heading
江刺, 正喜, 1949- エサシ, マサヨシ, 1949- ( 00154561 )Authorities
Publication, Distribution, etc.
Publication Date
[2021]
Publication Date (W3CDTF)
2021
Extent
xii, 506 pages
Size
25 cm