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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- ゲルマニウム ニ オケル ゲンシソウ カコウ ギジュツ ニ カンスル ケンキュウ
- Author/Editor
- 藤井拓也 [著]
- Author Heading
- 藤井, 拓也 フジイ, タクヤ
- Publication Date
- [2020]
- Publication Date (W3CDTF)
- 2020
- Extent
- 1冊
- Alternative Title
- Atomic layer defect-free etching of Ge
- Degree grantor/type
- 東北大学