Silicon sensors and actuators : the Feynman roadmap

• Material Type: 図書
• ISBN: 3030801349; 9783030801342
• Title: Silicon sensors and actuators : the Feynman roadmap
• Author/Editor: Benedetto Vigna, Paolo Ferrari, Flavio Francesco Villa, Ernesto Lasalandra, Sarah Zerbini, editors
• Author Heading: Vigna, Benedetto
• Publication, Distribution, etc.: Cham, Switzerland : Springer (出版)
• Publication Date: [2022]
• Publication Date (W3CDTF): 2022
• Extent: xiii, 997 pages
• Other physical details: illustrations (some color)
• Size: 25 cm
• Place of Publication (Country Code): CH
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Silicon diodes; Actuators
• LCC: TK7871.86
• NDLC: ND416
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and index
• Holding library: 国立国会図書館
• Call No.: ND416-D40
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 031666382; http://id.ndl.go.jp/bib/031666382
• OCLC No.: 1253473830; https://www.worldcat.org/oclc/1253473830
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: Part I: Silicon as sensor material. Silicon properties and crystal growth / Flavio Francesco VillaPart II: MEMS processes. Epitaxy / Roberto Campedell...
• Summary, etc.: "This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Re...