SANS를 이용한 저유전율 박막의 기공 특성 분석

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Material Type: 図書
Title: SANS를 이용한 저유전율 박막의 기공 특성 분석
Author/Editor: 제주대학교 연구
Author Heading: 제주 대학교 ( a1100029458 )Authorities
Publication, Distribution, etc.: [果川] : 과학기술부
Publication Date: 2007.10
Publication Date (W3CDTF): 2007
Extent: 68p
Size: 30cm
Alternative Title: Analysis of the porous properties of the low dielectric films by using SANS
Translation of Title: SANSを利用した低誘電率薄膜の気孔特性分析
Place of Publication (Country Code): KR
Text Language Code: kor
eng
NDLC: ND21
Note (General): 文献あり
Holding library: 国立国会図書館
Call No.: ND21-K1
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): a1000069783
http://id.ndl.go.jp/bib/a1000069783
Bibliographic Record Category (NDL): 511