博士論文

Reduction in Mg Ion Implantation Damage and GaN Direct Growth on SiC Substrate for Vertical Power Device Applications

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Reduction in Mg Ion Implantation Damage and GaN Direct Growth on SiC Substrate for Vertical Power Device Applications

Persistent ID (NDL)
info:ndljp/pid/10120954
Material type
博士論文
Author
Sun, Zhengほか
Publisher
-
Publication date
2016-03-25
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
名古屋大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
Sun, Zheng
孫, 政
Author Heading
Publication Date
2016-03-25
Publication Date (W3CDTF)
2016-03-25
Alternative Title
縦型パワーデバイス応用のためのMgイオン注入ダメージの低減及びSiC基板へのGaN直接成長に関する研究
Degree grantor/type
名古屋大学
Date Granted
2016-03-25
Date Granted (W3CDTF)
2016-03-25