プラズマプロセスによるDLC薄膜の成膜とナノ構造化に関する研究
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国立国会図書館デジタルコレクション
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- Material Type
- 博士論文
- Author/Editor
- 針谷, 達
- Publication, Distribution, etc.
- Publication Date
- 2015-03
- Publication Date (W3CDTF)
- 2015-03
- Alternative Title
- Deposition and Nanostructuring of DLC Films by Plasma Processes
- Contributor
- 八田,章光
- Degree grantor/type
- 高知工科大学
- Date Granted
- 2015-03-20