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窒化炭素および窒化ホウ素非晶質薄膜の作成と機械的特性に関する研究
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- Material Type
- 博士論文
- Author/Editor
- 城谷, 友保
- Publication Date
- 2016-03-22
- Publication Date (W3CDTF)
- 2016-03-22
- Alternative Title
- Study on the preparation of Carbon Nitride and Boron Nitride amorphous films and their mechanical properties
- Degree grantor/type
- 千葉工業大学
- Date Granted
- 2016-03-22
- Date Granted (W3CDTF)
- 2016-03-22
- Dissertation Number
- 甲第189号