博士論文

レーザーアニールによる接合形成と高性能パワーSi MOS FETs に関する研究

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レーザーアニールによる接合形成と高性能パワーSi MOS FETs に関する研究

Persistent ID (NDL)
info:ndljp/pid/10342409
Material type
博士論文
Author
陳, 訳ほか
Publisher
琉球大学
Publication date
2016-09
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
琉球大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
陳, 訳
Chen, Yi
Author Heading
Publication, Distribution, etc.
Publication Date
2016-09
Publication Date (W3CDTF)
2016-09
Alternative Title
Research on Junction Formation Using Laser Annealing For High Performance Si Power MOS FETs
Degree grantor/type
琉球大学
Date Granted
2016-09-14