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Volume number2001
101 マイクロマシ...

101 マイクロマシン技術で作るナノ構造とその応用(M&Mのニューアスペクト)

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101 マイクロマシン技術で作るナノ構造とその応用(M&Mのニューアスペクト)

Persistent ID (NDL)
info:ndljp/pid/10351140
Material type
記事
Author
藤田,博之ほか
Publisher
日本機械学会
Publication date
2001-03-27
Material Format
Digital
Journal name
材料力学部門春のシンポジウム講演論文集 2001
Publication Page
p.1-4
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Notes on use

Note (General):

著者所属: 東京大著者所属: 香川大Affiliation: University of Tokyo...

Detailed bibliographic record

Summary, etc.:

We present our recent study of micromachined nano-structures. To overcome difficulty of reliable fabrication of nano-structures, conventional anisotro...

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Digital

Material Type
記事
Author/Editor
藤田,博之
橋口,原
Publication, Distribution, etc.
Publication Date
2001-03-27
Publication Date (W3CDTF)
2001-03-27
Alternative Title
101 Micromachined Nano-structures and its aonlication for Nano-technology
Periodical title
材料力学部門春のシンポジウム講演論文集
No. or year of volume/issue
2001
Volume
2001