博士論文

大気圧プラズマを用いた多電極全面一括型ナノ精度数値制御加工法の開発

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大気圧プラズマを用いた多電極全面一括型ナノ精度数値制御加工法の開発

Persistent ID (NDL)
info:ndljp/pid/10371555
Material type
博士論文
Author
武居, 弘泰
Publisher
-
Publication date
2017-03-22
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
大阪大学,博士(工学)
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Notes on use at the National Diet Library

Table of Contents

  • 2017-10-02 再収集

  • 2017-10-02 再収集

  • 2021-05-28 再収集

  • 2021-05-28 再収集

  • 2022-11-07 再収集

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Digital

Material Type
博士論文
Title Transcription
タイキアツプラズマヲモチイタタデンキョクゼンメンイッカツガタナノセイドスウチセイギョカコウホウノカイハツ
Author/Editor
武居, 弘泰
Author Heading
Publication Date
2017-03-22
Publication Date (W3CDTF)
2017-03-22
Alternative Title
タイキアツプラズマヲモチイタタデンキョクゼンメンイッカツガタナノセイドスウチセイギョカコウホウノカイハツ
Degree grantor/type
大阪大学
Date Granted
2017-03-22