大気圧プラズマを用いた多電極全面一括型ナノ精度数値制御加工法の開発
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国立国会図書館デジタルコレクション
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DOI[10.18910/61767]to the data of the same series
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- Material Type
- 博士論文
- Title Transcription
- タイキアツプラズマヲモチイタタデンキョクゼンメンイッカツガタナノセイドスウチセイギョカコウホウノカイハツ
- Author/Editor
- 武居, 弘泰
- Author Heading
- Publication Date
- 2017-03-22
- Publication Date (W3CDTF)
- 2017-03-22
- Alternative Title
- タイキアツプラズマヲモチイタタデンキョクゼンメンイッカツガタナノセイドスウチセイギョカコウホウノカイハツ
- Degree grantor/type
- 大阪大学
- Date Granted
- 2017-03-22