5. Polymerization in Fluorocarbon Plasmas : Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing

• Material Type: 記事
• Title: 5. Polymerization in Fluorocarbon Plasmas : Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing
• Author/Editor: TACHIBANA,Kunihide; STOFFELS,Eva; 橘邦英
• Publication, Distribution, etc.: 日本 : プラズマ・核融合学会
• Publication Date: 1999-07-25
• Publication Date (W3CDTF): 1999-07-25
• Periodical title: プラズマ・核融合学会誌
• No. or year of volume/issue: 75(7)
• Volume: 75(7)
• Pages: 800-812
• Text Language Code: ENG
• Alias of Author: STOFFELS,Eva; STOFFELS,Winfred W.; TACHIBANA,Kunihide
• Subject Heading: fluorocarbon gas; plasma processing; polymerization; electron attachment; mass spectrometry; photodetachment; infrared absorption spectroscopy
• Note (General): 著者所属: Department of Technical Physics, Eindhoven University of Technology; 著者所属: Department of Electronic Science and Engineering, Kyoto University
• Persistent ID (NDL): info:ndljp/pid/10453669; https://dl.ndl.go.jp/pid/10453669
• Collection: 障害者向け資料
• Collection (Materials For Handicapped People:1): テキストデータ
• Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会; https://dl.ndl.go.jp/collections/B00043
• Acquisition Basis: NII-ELS
• Available (W3CDTF): 2017-08-23
• Date Accepted (W3CDTF): 2017-08-15
• Date Captured (W3CDTF): 2017-08-15
• Format (IMT): application/pdf
• Access Restrictions: インターネット公開
• Availability of remote photoduplication service: 不可
• Periodical Title (Persistent ID (NDL)): info:ndljp/pid/10388839; https://dl.ndl.go.jp/pid/10388839
• Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション; https://dl.ndl.go.jp

• Summary, etc.: Polymerization processes in low-pressure plasmas used for industrial surface processing are surveyed. Special attention is given to fluorocarbon plasm...