26aB11 テーバー付きホロー陰極を用いたrf放電プラズマ特性(ヘリカル/プラズマ応用)
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- Material Type
- 記事
- Author/Editor
- 山家,清之松岡,昭男近藤,義臣高橋,俊樹佐藤,紘一
- Publication, Distribution, etc.
- Publication Date
- 1999-11-20
- Publication Date (W3CDTF)
- 1999-11-20
- Alternative Title
- rf Discharge Plasmas by a Hollow Cathode with Tapered Shape
- Periodical title
- プラズマ・核融合学会年会予稿集
- No. or year of volume/issue
- (16)
- Volume
- (16)