318 Surface Analysis of TiN Thin Films Produced by Dynamic Mixing Method

Persistent ID (NDL): info:ndljp/pid/10742537

Material type: 記事

Author: Fauziほか

Publisher: 日本材料学会

Publication date: 1991-05-22

Material Format: Digital

Journal name: 学術講演会前刷 40

Publication Page: p.333-335

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Note (General)：: 著者所属: The University of Tokushima著者所属: Dept. of Mech. and Production, The University of Tokushima著者所属: Dept. of Chem. and Mater. Eng., The University ...

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Material Type: 記事
Title: 318 Surface Analysis of TiN Thin Films Produced by Dynamic Mixing Method
Title Transcription: 318 Surface Analysis of TiN Thin Films Produced by Dynamic Mixing Method
Author/Editor: Fauzi
Murakami.,R.
Ferguson.,W. G.
Publication, Distribution, etc.: 日本 : 日本材料学会
Publication Date: 1991-05-22
Publication Date (W3CDTF): 1991-05-22
Periodical title: 学術講演会前刷
No. or year of volume/issue: 40
Volume: 40
Pages: 333-335
Text Language Code: ENG
Note (General): 著者所属: The University of Tokushima
著者所属: Dept. of Mech. and Production, The University of Tokushima
著者所属: Dept. of Chem. and Mater. Eng., The University of Auckland
レポート・講演番号: 318
Persistent ID (NDL): info:ndljp/pid/10742537
https://dl.ndl.go.jp/pid/10742537
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
https://dl.ndl.go.jp/collections/B00043
Acquisition Basis: NII-ELS
Available (W3CDTF): 2017-08-30
Date Accepted (W3CDTF): 2017-08-22
Date Captured (W3CDTF): 2017-08-22
Format (IMT): application/pdf
Access Restrictions: インターネット公開
Availability of remote photoduplication service: 不可
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/10395292
https://dl.ndl.go.jp/pid/10395292
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp