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Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique
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- Material Type
- 博士論文
- Author/Editor
- Wang, Xinzhi
- Author Heading
- Publication Date
- 2017-09-28
- Publication Date (W3CDTF)
- 2017-09-28
- Alternative Title
- 対向ターゲット式DCスパッタリング法によるIn-Ga-Zn-OおよびIn-Sn-Zn-O系透明導電性酸化物薄膜の作製
- Degree grantor/type
- 徳島大学
- Date Granted
- 2017-09-28
- Date Granted (W3CDTF)
- 2017-09-28