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博士論文

Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique

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Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique

Persistent ID (NDL)
info:ndljp/pid/11008892
Material type
博士論文
Author
Wang, Xinzhi
Publisher
-
Publication date
2017-09-28
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
徳島大学,博士（工学）
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Digital

Material Type
博士論文
Title
Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique
Author/Editor
Wang, Xinzhi
Author Heading
Wang, Xinzhi
Publication Date
2017-09-28
Publication Date (W3CDTF)
2017-09-28
Alternative Title
対向ターゲット式DCスパッタリング法によるIn-Ga-Zn-OおよびIn-Sn-Zn-O系透明導電性酸化物薄膜の作製
Degree grantor/type
徳島大学
Date Granted
2017-09-28
Date Granted (W3CDTF)
2017-09-28