博士論文
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弾道電子照射による還元性薄膜堆積の研究

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弾道電子照射による還元性薄膜堆積の研究

Persistent ID (NDL)
info:ndljp/pid/11008901
Material type
博士論文
Author
須田, 隆太郎
Publisher
東京農工大学
Publication date
2017-09-20
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
東京農工大学,博士(工学),Doctor of Philosophy (Engineering)
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Table of Contents

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Bibliographic Record

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Digital

Material Type
博士論文
Title Transcription
ダンドウデンシショウシャニヨルカンゲンセイハクマクタイセキノケンキュウ
Author/Editor
須田, 隆太郎
Author Heading
Publication, Distribution, etc.
Publication Date
2017-09-20
Publication Date (W3CDTF)
2017-09-20
Alternative Title
Study on reductive deposition of thin films based on ballistic electron incidence
Degree grantor/type
東京農工大学