単結晶ダイヤモンド測定針の高精度加工法
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Bibliographic Record
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- Material Type
- 記事
- Title
- Author/Editor
- 久保雅裕鷹巣良史和田紀彦
- Publication, Distribution, etc.
- Publication Date
- 2016-11
- Publication Date (W3CDTF)
- 2016-11
- Alternative Title
- Development of high-precision processing technology for single-crystal diamond stylus
- Periodical title
- パナソニック技報
- No. or year of volume/issue
- 62(2)
- Volume
- 62(2)