静電2軸MEMS光スキャナの絶縁構造
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Title
- Author/Editor
- 河野清彦萩原洋右上田英喜
- Publication, Distribution, etc.
- Publication Date
- 2008-09
- Publication Date (W3CDTF)
- 2008-09
- Alternative Title
- Two-dimensional optical MEMS scanner with novel electrical insulation structure
- Periodical title
- 松下電工技報
- No. or year of volume/issue
- 56(3)
- Volume
- 56(3)