圧電アクチュエータによるステッパの制振

Persistent ID (NDL): info:ndljp/pid/11147520

Material type: 記事

Author: 下郷,太郎ほか

Publisher: 日本AEM学会

Publication date: 1995-03-10

Material Format: Digital

Journal name: 日本AEM学会誌 3(1)

Publication Page: p.34-39

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Note (General)：: 著者所属: 神奈川工科大著者所属: 慶応大Affiliation: Kanagawa Institute of Technology...

Detailed bibliographic record

Summary, etc.：: To control the relative horizontal vibration between a wafer and an optical lens system at the stepper, which is caused by the stepping movement of th...

Bibliographic Record

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Digital

Material Type: 記事
Title: 圧電アクチュエータによるステッパの制振
Author/Editor: 下郷,太郎
宮地,秀征
木鋪,高之
Publication, Distribution, etc.: 日本 : 日本AEM学会
Publication Date: 1995-03-10
Publication Date (W3CDTF): 1995-03-10
Alternative Title: Vibration Control of Stepper Using Piezoelectric Actuators
Periodical title: 日本AEM学会誌
No. or year of volume/issue: 3(1)
Volume: 3(1)
Pages: 34-39
Text Language Code: JPN
Alias of Author: SHIMOGO,Taro
MIYAJI,Hideyuki
KISHIKU,Takayuki
Subject Heading: Stepper
Vibration Control
Piezoelectric Actuator
Optimal Regulator
Note (General): 著者所属: 神奈川工科大
著者所属: 慶応大
Affiliation: Kanagawa Institute of Technology
Affiliation: Keio University
Persistent ID (NDL): info:ndljp/pid/11147520
https://dl.ndl.go.jp/pid/11147520
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
https://dl.ndl.go.jp/collections/B00043
Acquisition Basis: NII-ELS
Available (W3CDTF): 2018-09-12
Date Accepted (W3CDTF): 2018-09-05
Date Captured (W3CDTF): 2018-09-05
Format (IMT): application/pdf
Access Restrictions: インターネット公開
Availability of remote photoduplication service: 不可
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11151294
https://dl.ndl.go.jp/pid/11151294
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp