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電子書籍・電子雑誌日本AEM学会誌
Volume number3 1
圧電アクチュエータに...

圧電アクチュエータによるステッパの制振

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圧電アクチュエータによるステッパの制振

Persistent ID (NDL)
info:ndljp/pid/11147520
Material type
記事
Author
下郷,太郎ほか
Publisher
日本AEM学会
Publication date
1995-03-10
Material Format
Digital
Journal name
日本AEM学会誌 3(1)
Publication Page
p.34-39
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Notes on use

Note (General):

著者所属: 神奈川工科大著者所属: 慶応大Affiliation: Kanagawa Institute of Technology...

Detailed bibliographic record

Summary, etc.:

To control the relative horizontal vibration between a wafer and an optical lens system at the stepper, which is caused by the stepping movement of th...

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Digital

Material Type
記事
Author/Editor
下郷,太郎
宮地,秀征
木鋪,高之
Publication, Distribution, etc.
Publication Date
1995-03-10
Publication Date (W3CDTF)
1995-03-10
Alternative Title
Vibration Control of Stepper Using Piezoelectric Actuators
Periodical title
日本AEM学会誌
No. or year of volume/issue
3(1)
Volume
3(1)