MEMS材料の力学特性評価

Persistent ID (NDL): info:ndljp/pid/11148809

Material type: 記事

Author: 小川,博文

Publisher: 日本AEM学会

Publication date: 2006-12-10

Material Format: Digital

Journal name: 日本AEM学会誌 14(4)

Publication Page: p.371-378

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Notes on use

Note (General)：: 著者所属: 産業技術総合研究所

Detailed bibliographic record

Summary, etc.：: This paper provides a brief review of techniques and procedures to measure mechanical properties of micro electro mechanical systems (MEMS) materials....

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Digital

Material Type: 記事
Title: MEMS材料の力学特性評価
Author/Editor: 小川,博文
Publication, Distribution, etc.: 日本 : 日本AEM学会
Publication Date: 2006-12-10
Publication Date (W3CDTF): 2006-12-10
Alternative Title: Evaluation of Mechanical Properties of MEMS Materials
Periodical title: 日本AEM学会誌
No. or year of volume/issue: 14(4)
Volume: 14(4)
Pages: 371-378
Text Language Code: JPN
Alias of Author: OGAWA,Hirofumi
Subject Heading: MEMS
mechanical properties
thin film
tensile test
standardization
titanium
sputtering
Note (General): 著者所属: 産業技術総合研究所
Persistent ID (NDL): info:ndljp/pid/11148809
https://dl.ndl.go.jp/pid/11148809
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
https://dl.ndl.go.jp/collections/B00043
Acquisition Basis: NII-ELS
Available (W3CDTF): 2018-09-12
Date Accepted (W3CDTF): 2018-09-05
Date Captured (W3CDTF): 2018-09-05
Format (IMT): application/pdf
Access Restrictions: インターネット公開
Availability of remote photoduplication service: 不可
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11151341
https://dl.ndl.go.jp/pid/11151341
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp