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低抵抗接続を目的とした垂直配向カーボンナノチューブと金属薄膜の表面活性化接合
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国立国会図書館デジタルコレクション
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DOI[info:doi/10.15083/00075055]to the data of the same series
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- Material Type
- 博士論文
- Author/Editor
- 藤野, 真久
- Publication Date
- 2017-02-02
- Publication Date (W3CDTF)
- 2017-02-02
- Alternative Title
- Surface Activated Bonding between Vertically Aligned Carbon Nanotubes and Metal Substrate for Low Resistance Interconnect
- Degree grantor/type
- University of Tokyo(東京大学)
- Date Granted
- 2017-02-02
- Date Granted (W3CDTF)
- 2017-02-02
- Dissertation Number
- 乙第18243号