新たな量子収率測定方法と水晶振動子マイクロバランス法を用いたネガ型フォトレジストのパターン形成におけるメカニズム解析
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DOI[10.18910/70746]to the data of the same series
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2021-05-28 再収集
2021-05-28 再収集
2022-11-07 再収集
2023-09-05 再収集
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- Material Type
- 博士論文
- Title Transcription
- アラタナリョウシシュウリツソクテイホウトスイショウシンドウシマイクロバランスホウヲモチイタネガガタフォトレジストノパターンケイセイニオケルメカニズムカイセキ
- Author/Editor
- 木村, 明日香
- Author Heading
- Publication Date
- 2018-09-25
- Publication Date (W3CDTF)
- 2018-09-25
- Alternative Title
- Mechanism analysis in pattern formation of negative type photoresist using novel quantum yield measurement and quartz crystal microbalance method
- Degree Grantor
- 大阪大学
- Date Granted
- 2018-09-25