博士論文
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Strain-controlled AlN growth on SiC substrates

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Strain-controlled AlN growth on SiC substrates

Persistent ID (NDL)
info:ndljp/pid/11238167
Material type
博士論文
Author
金子, 光顕
Publisher
金子, 光顕
Publication date
2016
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
京都大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
金子, 光顕
Publication, Distribution, etc.
Publication Date
2016
Publication Date (W3CDTF)
2016
Alternative Title
SiC基板上への歪み制御AlN層の成長
Degree grantor/type
京都大学
Date Granted
2016-09-23
Date Granted (W3CDTF)
2016-09-23