博士論文

先端半導体デバイス対応欠陥レビュー走査型電子顕微鏡の画像処理技術に関する研究

Icons representing 博士論文
The cover of this title could differ from library to library. Link to Help Page

Available in National Diet Library

Find on the publisher's website

国立国会図書館デジタルコレクション

Digital data available

Check on the publisher's website

DOI[10.18910/72586]to the data of the same series

先端半導体デバイス対応欠陥レビュー走査型電子顕微鏡の画像処理技術に関する研究

Persistent ID (NDL)
info:ndljp/pid/11301601
Material type
博士論文
Author
原田, 実
Publisher
-
Publication date
2019-03-25
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
大阪大学,博士（情報科学）
View All

Notes on use at the National Diet Library

Notes on use

Note (General)：

Minoru Harada, Yohei Minekawa, Fumihiko Fukunaga, and Koji Nakamae, "In-die overlay metrology method using SEM images," Journal of Micro/Nanolithograp...

Search by Bookstore

Search by Bookstore

Read this material in an accessible format.

View materials in accessible formats for people with print disabilities (1Type)

Table of Contents

  • 2021-05-28 再収集

  • 2021-05-28 再収集

  • 2022-11-07 再収集

  • 2022-11-07 再収集

  • 2023-03-07 再収集

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • OUKA (Osaka University Knowledge Archive)

    Digital
    You can check the holdings of institutions and databases with which Institutional Repositories DataBase(IRDB)(Institutional Repository) is linked at the site of Institutional Repositories DataBase(IRDB)(Institutional Repository).
    OUKA (Osaka University Knowledge Archive)

Search by Bookstore

Read in Disability Resources

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Digital

Material Type
博士論文
Title
先端半導体デバイス対応欠陥レビュー走査型電子顕微鏡の画像処理技術に関する研究
Title Transcription
センタンハンドウタイデバイスタイオウケッカンレビューソウサガタデンシケンビキョウノガゾウショリギジュツニカンスルケンキュウ
Author/Editor
原田, 実
Author Heading
原田, 実
Publication Date
2019-03-25
Publication Date (W3CDTF)
2019-03-25
Alternative Title
センタンハンドウタイデバイスタイオウケッカンレビューソウサガタデンシケンビキョウノガゾウショリギジュツニカンスルケンキュウ
Degree grantor/type
大阪大学
Date Granted
2019-03-25