(100) Oriented Poly-Si Thin Film Formation and Ultrahigh-Performance Poly-Si Thin Film Transistors Fabrication with Multi-Line Beam Continuous-Wave Laser Lateral Crystallization

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(100) Oriented Poly-Si Thin Film Formation and Ultrahigh-Performance Poly-Si Thin Film Transistors Fabrication with Multi-Line Beam Continuous-Wave Laser Lateral Crystallization

Persistent ID (NDL): info:ndljp/pid/11337671

Material type: 博士論文

Author: Nguyen, Thi Thuy

Publisher: -

Publication date: 2018-03-23

Material Format: Digital

Capacity, size, etc.: -

Name of awarding university/degree: 広島大学,博士(理学),Doctor of Science

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Material Type: 博士論文
Title: (100) Oriented Poly-Si Thin Film Formation and Ultrahigh-Performance Poly-Si Thin Film Transistors Fabrication with Multi-Line Beam Continuous-Wave Laser Lateral Crystallization
Author/Editor: Nguyen, Thi Thuy
Author Heading: Nguyen, Thi Thuy
Publication Date: 2018-03-23
Publication Date (W3CDTF): 2018-03-23
Alternative Title: マルチライン連続発振レーザ・ラテラル結晶化による(100)面方位制御多結晶シリコン薄膜形成と高性能多結晶シリコン薄膜トランジスタの作製
Degree grantor/type: 広島大学
Date Granted: 2018-03-23
Date Granted (W3CDTF): 2018-03-23
Dissertation Number: 甲第7543号
Degree Type: 博士(理学)
Doctor of Science
Conferring No. (Dissertation): 甲第7543号
Text Language Code: eng
Target Audience: 一般
Persistent ID (NDL): info:ndljp/pid/11337671
https://dl.ndl.go.jp/pid/11337671
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（自動収集）
Date Accepted (W3CDTF): 2019-08-03T12:23:27+09:00
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): http://ir.lib.hiroshima-u.ac.jp/00046126
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp