Hybrid laser scribing and chemical etching technique using pulsed Nd3+:YAG laser to fabricate controlled micro channel profile

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DOI[10.2961/jlmn.2018.03.0002]to the data of the same series

Hybrid laser scribing and chemical etching technique using pulsed Nd3+:YAG laser to fabricate controlled micro channel profile

Persistent ID (NDL): info:ndljp/pid/11375360

Material type: 記事

Author: Srinagalakshmi Nammiほか

Publisher: Japan Laser Processing Society

Publication date: 2018-12

Material Format: Digital

Journal name: Journal of laser micro/nanoengineering 13(3)

Publication Page: -

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Material Type: 記事
Title: Hybrid laser scribing and chemical etching technique using pulsed Nd3+:YAG laser to fabricate controlled micro channel profile
Author/Editor: Srinagalakshmi Nammi
Sooraj Shiby
Bharat S Amroop
Publication, Distribution, etc.: 日本 : Japan Laser Processing Society
Publication Date: 2018-12
Publication Date (W3CDTF): 2018-12
Periodical title: Journal of laser micro/nanoengineering
No. or year of volume/issue: 13(3)
Volume: 13(3)
ISSN (Periodical Title): 1880-0688
ISSN-L (Periodical Title): 1880-0688
Text Language Code: eng
DOI: 10.2961/jlmn.2018.03.0002
https://doi.org/10.2961/jlmn.2018.03.0002
Persistent ID (NDL): info:ndljp/pid/11375360
https://dl.ndl.go.jp/pid/11375360
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
https://dl.ndl.go.jp/collections/B00043
Acquisition Basis: オンライン資料収集制度
Date Accepted (W3CDTF): 2019-10-18T21:40:27+09:00
Date Captured (W3CDTF): 2019-03-22
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): https://www.jlps.gr.jp/jlmn/index.php?action=laser_volno&volno=1303
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11375358
https://dl.ndl.go.jp/pid/11375358
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp