博士論文

SOI-MEMS技術による静電容量式マイクロ加速度センサの最適化に関する研究

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SOI-MEMS技術による静電容量式マイクロ加速度センサの最適化に関する研究

Persistent ID (NDL)
info:ndljp/pid/11479147
Material type
博士論文
Author
劉, 健男
Publisher
-
Publication date
2019-03-22
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
千葉工業大学,博士(工学)
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Digital

Material Type
博士論文
Title
SOI-MEMS技術による静電容量式マイクロ加速度センサの最適化に関する研究
Author/Editor
劉, 健男
Publication Date
2019-03-22
Publication Date (W3CDTF)
2019-03-22
Alternative Title
Study on Optimization of MEMS Capacitive Accelerometers Fabricated using SOI-MEMS Technology
Degree grantor/type
千葉工業大学
Date Granted
2019-03-22
Date Granted (W3CDTF)
2019-03-22
Dissertation Number
甲第220号