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博士論文

CT-TDLAS measurements of gas concentration and temperature distributions in a semiconductor chamber

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CT-TDLAS measurements of gas concentration and temperature distributions in a semiconductor chamber

Persistent ID (NDL)
info:ndljp/pid/11490366
Material type
博士論文
Author
Hayashi, Daisuke
Publisher
-
Publication date
2020-03-06
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
徳島大学,博士（工学）
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Digital

Material Type
博士論文
Title
CT-TDLAS measurements of gas concentration and temperature distributions in a semiconductor chamber
Author/Editor
Hayashi, Daisuke
Author Heading
Hayashi, Daisuke
Publication Date
2020-03-06
Publication Date (W3CDTF)
2020-03-06
Alternative Title
CT-TDLASによる半導体チャンバ内のガス濃度・温度分布測定
Degree grantor/type
徳島大学
Date Granted
2020-03-06
Date Granted (W3CDTF)
2020-03-06