博士論文

Microscopy study of correlation between residual elastic strain and defects in He⁺ ion irradiated 4H-SiC

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Microscopy study of correlation between residual elastic strain and defects in He⁺ ion irradiated 4H-SiC

Persistent ID (NDL)
info:ndljp/pid/11582509
Material type
博士論文
Author
Yang Subing
Publisher
Yang Subing
Publication date
2020
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
北海道大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
Yang Subing
Publication, Distribution, etc.
Publication Date
2020
Publication Date (W3CDTF)
2020
Alternative Title
He⁺イオン照射した4H-SiCの残留弾性歪と欠陥の相互関係に関する顕微学的研究
Degree grantor/type
北海道大学
Date Granted
2020-09-25
Date Granted (W3CDTF)
2020-09-25