NMRによるオゾン処理下でのレジスト分解挙動の解析
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- Material Type
- 記事
- Author/Editor
- 藤井寿上元好仁太田裕充
- Publication, Distribution, etc.
- Alternative Title
- NMR analysis of photo-resist decomposition process caused by ozonization in ethylenecarbonate
- Periodical title
- 研究報告
- No. or year of volume/issue
- 2008(14)
- Volume
- 2008(14)
- Text Language Code
- jpn
- Persistent ID (NDL)
- info:ndljp/pid/11615696