Selective epitaxial growth of single crystal diamond and its application for high-performance diamond MOSFET fabrication

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Selective epitaxial growth of single crystal diamond and its application for high-performance diamond MOSFET fabrication

Persistent ID (NDL): info:ndljp/pid/11634368

Material type: 博士論文

Author: 費, 文茜ほか

Publisher: -

Publication date: 2020

Material Format: Digital

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Name of awarding university/degree: 早稲田大学,博士(工学)

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Note (General)：: 早大学位記番号:新8568

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Material Type: 博士論文
Title: Selective epitaxial growth of single crystal diamond and its application for high-performance diamond MOSFET fabrication
Author/Editor: 費, 文茜
Fei, Wenxi
Author Heading: 費, 文茜
Fei, Wenxi
Publication Date: 2020
Publication Date (W3CDTF): 2020
Alternative Title: 高品質単結晶ダイヤモンドの選択エピタキシャル成長およびその高性能ダイヤモンドMOSFETへの適用
Degree grantor/type: 早稲田大学
Date Granted: 2020-07-16
Date Granted (W3CDTF): 2020-07-16
Dissertation Number: 甲第6156号
Degree Type: 博士(工学)
Conferring No. (Dissertation): 甲第6156号
Text Language Code: eng
Target Audience: 一般
Note (General): 早大学位記番号:新8568
Persistent ID (NDL): info:ndljp/pid/11634368
https://dl.ndl.go.jp/pid/11634368
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（自動収集）
Date Accepted (W3CDTF): 2021-02-07T06:27:20+09:00
Date Created (W3CDTF): 2020-10-30
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): http://hdl.handle.net/2065/00074183
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp